Dedication

Dedicated to my family

Contents

Foreword

Preface

Acknowledgements

Prologue

1. INTRODUCTION

2. SENSORS AND ACTUATORS-I

3. SENSORS AND ACTUATORS-II

4. MICROMACHINING

5. POLYMER AND OPTICAL MEMS

References

Foreword

Chapter 1 deals with introduction .Chapter 2 describes the sensors and actuators for industrial applications using temperature sensnsors.Chapter 3 describes the sensors and actuators for industrial applications using pressure sensnsors.chapter 4 explains the micromaching and chapter 5 discusses the applications of optical mems

Preface

CHAPTER I INTRODUCTION

Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators – Introduction to Micro fabrication - Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS – Semiconductor devices – Stress and strain analysis – Flexural beam bending- Torsional deflection.

CHAPTER II SENSORS AND ACTUATORS-I

Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices – Micro Grippers – Micro Motors - Thermal Sensing and Actuation – Thermal expansion – Thermal couples – Thermal resistors – Thermal Bimorph - Applications – Magnetic Actuators – Micromagnetic components – Case studies of MEMS in magnetic actuators- Actuation using Shape Memory Alloys.

CHAPTER III SENSORS AND ACTUATORS-II

Piezoresistive sensors – Piezoresistive sensor materials - Stress analysis of mechanical elements – Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials – Applications to Inertia , Acoustic, Tactile and Flow sensors.

CHAPTER IV MICROMACHINING

Silicon Anisotropic Etching – Anisotrophic Wet Etching – Dry Etching of Silicon – Plasma Etching – Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase Etchants– Case studies –Basic surface micro machining processes – Structural and Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antistriction methods – LIGA Process - Assembly of 3D MEMS – Foundry process.

CHAPTER V POLYMER AND OPTICAL MEMS

Polymers in MEMS– Polimide - SU-8 - Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene – Fluorocarbon - Application to Acceleration, Pressure, Flow and Tactile sensors-Optical MEMS – Lenses and Mirrors – Actuators for Active Optical MEMS.